Traceable atomic force microscope based on monochromatic...

Precision Engineering 2020 / 01 Vol. 61

Traceable atomic force microscope based on monochromatic light interference

Yang, Wenjun, Liu, Xiaojun, Lu, Wenlong, Lei, Zili, Hu, Chi, Chen, Cheng
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Volume:
61
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2019.10.001
Date:
January, 2020
File:
PDF, 1.60 MB
2020
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