Characterization of surface modification mechanisms for boron nitride films under plasma exposure
Higuchi, Tomoya, Noma, Masao, Yamashita, Michiru, Urabe, Keiichiro, Hasegawa, Shigehiko, Eriguchi, KojiVolume:
377
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2019.07.071
Date:
November, 2019
File:
PDF, 3.86 MB
2019