AFM Integrated with SEM/FIB for Complete 3D Metrology...

Microscopy and Microanalysis 2015 / 08 Vol. 21; Iss. S3

AFM Integrated with SEM/FIB for Complete 3D Metrology Measurements

Lewis, Aaron, Komissar, A., Ignatov, A., Fedoroyov, Oleg, Maayan, E.
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Volume:
21
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927615007941
Date:
August, 2015
File:
PDF, 138 KB
english, 2015
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