[ACM Press the Genetic and Evolutionary Computation Conference Companion - Prague, Czech Republic (2019.07.13-2019.07.17)] Proceedings of the Genetic and Evolutionary Computation Conference Companion on - GECCO '19 - Multi-objective genetic algorithms for reducing mark read-out effort in lithographic tests
Frisco, Pierluigi, Bootsma, Timo, Bäck, ThomasYear:
2019
Language:
english
DOI:
10.1145/3319619.3321931
File:
PDF, 274 KB
english, 2019