Plasma-Chemistry of Arsenic Selenide Films: Relationship Between Film Properties and Plasma Power
Mochalov, Leonid, Logunov, Alexander, Kitnis, Anna, Vorotyntsev, VladimirLanguage:
english
Journal:
Plasma Chemistry and Plasma Processing
DOI:
10.1007/s11090-019-10035-4
Date:
October, 2019
File:
PDF, 2.78 MB
english, 2019