Piezotransducer matrix integrated in silicon for stress...

Sensors and Actuators A: Physical 2019 / 10 Vol. 298

Piezotransducer matrix integrated in silicon for stress mapping in packaged devices

Ramirez, Jose L., Fruett, Fabiano
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Volume:
298
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2019.111567
Date:
October, 2019
File:
PDF, 3.26 MB
english, 2019
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