Mitigating the Impact of Mask Absorber Error on...

Mitigating the Impact of Mask Absorber Error on Lithographic Performance by Lithography System Holistic Optimization

Sheng, Naiyuan, Li, Enze, Sun, Yiyu, Li, Tie, Li, Yanqiu, Wei, Pengzhi, Liu, Lihui
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Volume:
9
Language:
english
Journal:
Applied Sciences
DOI:
10.3390/app9071275
Date:
March, 2019
File:
PDF, 2.43 MB
english, 2019
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