Unbalanced Magnetron Sputtering Deposits Hard, Dense...

Unbalanced Magnetron Sputtering Deposits Hard, Dense Coatings on Many Materials

Sproul, William
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Volume:
7
Journal:
Materials and Processing Report
DOI:
10.1080/08871949.1992.11752495
Date:
May, 1992
File:
PDF, 1.44 MB
1992
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