Computational Study of Pattern Formationin UV Nanoimprint...

Journal of Photopolymer Science and Technology 2018 / 6 Vol. 31; Iss. 2

Computational Study of Pattern Formationin UV Nanoimprint Lithography

Yasuda, Masaaki, Koyama, Masanori, Sakata, Reo, Shirai, Masamitsu, Kawata, Hiroaki, Hirai, Yoshihiko
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Volume:
31
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.31.189
Date:
June, 2018
File:
PDF, 3.87 MB
2018
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