Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2019 / 09 Vol. 37; Iss. 5
Imaging the native inversion layer under buried oxide in silicon-on-insulator radio frequency device technology via scanning surface photovoltage microscopy
Dahanayaka, Daminda H., Kaszuba, Philip V., Moszkowicz, Leon, Wells, Randall H., Alwine, Franklin J., Phelps, Richard A., Slinkman, James A., Wong, Andrew A., Bumm, Lloyd A.Volume:
37
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5111139
Date:
September, 2019
File:
PDF, 2.61 MB
2019