Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode
Kim, Kwanghyun, Moon, Seunghwan, Kim, Jinhwan, Park, Yangkyu, Lee, Jong-HyunVolume:
10
Journal:
Micromachines
DOI:
10.3390/mi10040217
Date:
March, 2019
File:
PDF, 18.14 MB
2019