Laser-assisted micro-grinding of Si3N4

Precision Engineering 2019 / 11 Vol. 60

Laser-assisted micro-grinding of Si3N4

Kadivar, Mohammadali, Shamray, Sergey, Soltani, Babak, Daneshi, Amir, Azarhoushang, Bahman
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Volume:
60
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2019.09.004
Date:
November, 2019
File:
PDF, 11.36 MB
2019
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