A Lateral Double-Diffusion Metal Oxide Semiconductor Device with a Gradient Charge Compensation Layer
Wu, Lijuan, Ding, Qilin, Chen, Jiaqi, Huang, Ye, Zhu, Lin, Zhang, Yinyan, Lei, BingLanguage:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-019-07579-8
Date:
September, 2019
File:
PDF, 1.41 MB
english, 2019