Development of in-situ particle...

Review of Scientific Instruments 2019 / 09 Vol. 90; Iss. 9

Development of in-situ particle monitor with beam homogenizing module for enhancement of nanoparticle countering efficiency

Kim, Jongho, Mun, Jihun, Lee, Kyuhang, Park, SangHyun, Lim, Sung Kyu, Lee, Chang-sug, Lim, Jong Yeon, Kang, Sang-Woo
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Volume:
90
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5111563
Date:
September, 2019
File:
PDF, 3.23 MB
english, 2019
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