Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2019 / 09 Vol. 37; Iss. 5
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Amorphous sulfide heterostructure precursors prepared by radio frequency sputtering
Roberts, Dennice M., Perkins, John D., Norman, Andrew G., Stoldt, Conrad R., Zakutayev, Andriy, Bauers, Sage R.Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5099502
Date:
September, 2019
File:
PDF, 2.35 MB
english, 2019