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physica status solidi (a) 2019 / 10

Micro‐/Nanopillars for Micro‐ and Nanotechnologies Using Inductively Coupled Plasmas

Herth, Etienne, Edmond, Samson, Bouville, David, Cercus, Jean Luc, Bayle, Fabien, Cambril, Edmond
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Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201900324
Date:
October, 2019
File:
PDF, 3.19 MB
english, 2019
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