Circuit Editing and Failure Analysis Applications using a...

Microscopy and Microanalysis 2015 / 08 Vol. 21; Iss. S3

Circuit Editing and Failure Analysis Applications using a Three-Ion-Beam (Ga, He and Ne) System and Gas Injection System (GIS)

Xia, Deying, Wu, Huimeng, Geotze, Bernhard, Ferranti, David, Stern, Lewis, Notte, John
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Volume:
21
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927615006613
Date:
August, 2015
File:
PDF, 3.14 MB
english, 2015
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