Energy-dispersive x-ray spectrum simulation and emprical...

Microscopy and Microanalysis 2015 / 08 Vol. 21; Iss. S3

Energy-dispersive x-ray spectrum simulation and emprical observation of 22nm node high-k metal gate structure

Rezadad, Imen, Prenitzer, Brenda, Schwarz, Stephen, Kempshall, Brian, Peale, Robert
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Volume:
21
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927615009708
Date:
August, 2015
File:
PDF, 370 KB
english, 2015
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