Millipixel image correlation for sub nm measurement of MEMS...

Journal of Micromechanics and Microengineering 2019 / 11 Vol. 29; Iss. 11

Millipixel image correlation for sub nm measurement of MEMS motion

Adderson, Ryan, Hubbard, Ted
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Volume:
29
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab3ede
Date:
November, 2019
File:
PDF, 1.92 MB
english, 2019
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