Effect of gas-phase processes in argon-helium-silane plasma...

Journal of Physics Conference Series 2019 / 08 Vol. 1260

Effect of gas-phase processes in argon-helium-silane plasma on amorphous-nanocrystalline transition in thin films of a-Si:H

Lyakhov, A A, Strunin, V I, Zh Khudaibergenov, G
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Volume:
1260
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1260/6/062014
Date:
August, 2019
File:
PDF, 688 KB
english, 2019
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