Influence on distance between substrate and target on the properties of CuO thin film prepared by DC reactive magnetron sputtering
Sangwaranatee, N.W., Sangwaranatee, N., Chananonnawathorn, C., Horprathum, M.Volume:
5
Year:
2018
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.02.037
File:
PDF, 383 KB
2018