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Characterization of Sublimation Based Microstructure Release Technique to Combat Stiction Effect
Sawant, Durvesh, Bhole, Kiran, Buktar, RajeshVolume:
5
Year:
2018
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.10.199
File:
PDF, 1.06 MB
2018