Fabrication of hollow microtip electrode array with...

Microelectronic Engineering 2019 / 08 Vol. 216

Fabrication of hollow microtip electrode array with variable diameter using self-aligned etching process

Nam, Kyeong-Taek, Lee, Seung-Ki, Park, Jae-Hyoung
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Volume:
216
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.111100
Date:
August, 2019
File:
PDF, 1.94 MB
2019
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