Study of self-masking nanostructuring of boron doped...

Vacuum 2019 / 12 Vol. 170

Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching

Marton, Marian, Ritomsky, Mario, Michniak, Pavol, Behul, Miroslav, Rehacek, Vlastimil, Redhammer, Robert, Vincze, Andrej, Papula, Martin, Vojs, Marian
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Volume:
170
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2019.108954
Date:
December, 2019
File:
PDF, 4.97 MB
2019
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