Amorphous IGZO TFT with High Mobility of ~70 cm2/Vs via...

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ACS Applied Materials & Interfaces 2019 / 10

Amorphous IGZO TFT with High Mobility of ~70 cm2/Vs via Vertical Dimension Control using PEALD

Sheng, Jiazhen, Hong, TaeHyun, Lee, Hyun-Mo, Kim, KyoungRok, Sasase, Masato, Kim, Junghwan, Hosono, Hideo, Park, Jin-Seong
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Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.9b14310
Date:
October, 2019
File:
PDF, 1019 KB
2019
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