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Synthesis and characterization of nanostructured molybdenum oxynitride films fabricated by sub-atmospheric chemical vapor deposition
Dřínek, Vladislav, Klementová, Mariana, Palatinus, Lukáš, Dytrych, Pavel, Fajgar, Radek, Jandová, Věra, Koštejn, Martin, Kupčík, JaroslavVolume:
808
Language:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2019.07.182
Date:
November, 2019
File:
PDF, 2.39 MB
english, 2019