FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout
Talic, Almir, Cerimovic, Samir, Beigelbeck, Roman, Kohl, Franz, Sauter, Thilo, Keplinger, FranzVolume:
19
Journal:
Sensors
DOI:
10.3390/s19163561
Date:
August, 2019
File:
PDF, 10.97 MB
2019