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Self-limiting Sb monolayer as a diffusion source for Ge doping
Sgarbossa, Francesco, Maggioni, Gianluigi, Rizzi, Gian Andrea, Carturan, Sara Maria, Napolitani, Enrico, Raniero, Walter, Carraro, Chiara, Bondino, Federica, Píš, Igor, De Salvador, DavideVolume:
496
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.143713
Date:
December, 2019
File:
PDF, 1.24 MB
2019