Hybrid Organic-Inorganic photoresists, a promising class of materials for Optofluidic integration
Elias, Jinane, Etienne, Pascal, Calas-Etienne, Sylvie, Duffours, Laurent, Fähnle, O., Vasdekis, A.Volume:
215
Year:
2019
Journal:
EPJ Web of Conferences
DOI:
10.1051/epjconf/201921516001
File:
PDF, 535 KB
2019