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Toward High-Resolution Inertial Sensors Employing Parametric Modulation in Coupled Micromechanical Resonators
Zhao, Chun, Zhou, Xin, Pandit, Milind, Sobreviela, Guillermo, Du, Sijun, Zou, Xudong, Seshia, AshwinVolume:
12
Language:
english
Journal:
Physical Review Applied
DOI:
10.1103/PhysRevApplied.12.044005
Date:
October, 2019
File:
PDF, 1.72 MB
english, 2019