![](/img/cover-not-exists.png)
[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Hermeticity of SI 1-X GE X Diaphragms for the Fabrication of a Capacitive Post-Cmos Pressure Sensor
Walk, Christian, Netaev, Alexander, Wiemann, Matthias, Gortz, Michael, Vogt, Holger, Mokwa, Wilfried, Seidl, KarstenYear:
2019
Language:
english
DOI:
10.1109/TRANSDUCERS.2019.8808725
File:
PDF, 920 KB
english, 2019