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IEEE Transactions on Semiconductor Manufacturing 2019

A Wafer Map Yield Prediction Based on Machine Learning for Productivity Enhancement

Jang, Sung-Ju, Kim, Jong-Seong, Kim, Tae-Woo, Lee, Hyun-Jin, Ko, Seung Bum
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Year:
2019
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2019.2945482
File:
PDF, 598 KB
english, 2019
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