[IEEE 2018 22nd International Conference on Ion...

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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Dose Dependent Profile Deviation of Implanted Aluminum in 4H-SiC During High Temperature Annealing

Kocher, Matthias, Rommel, Mathias, Sledziewski, Tomasz, Haublein, Volker, Bauer, Anton J.
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Year:
2018
Language:
english
DOI:
10.1109/iit.2018.8807904
File:
PDF, 1009 KB
english, 2018
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