3D MEMS in-chip solenoid inductor with high inductance...

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IEEE Electron Device Letters 2019

3D MEMS in-chip solenoid inductor with high inductance density for Power MEMS device

Xu, Tiantong, Sun, Jiamian, Wu, Hanxiao, Li, Haiwang, Li, Hanqing, Tao, Zhi
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Year:
2019
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2019.2941003
File:
PDF, 744 KB
english, 2019
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