Hexagonal boron nitride grown using high atomic boron emission during microwave plasma chemical vapor deposition
Chakrabarty, Kallol, Arnold, Ivan, Catledge, Shane A.Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5123210
Date:
December, 2019
File:
PDF, 2.52 MB
english, 2019