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6.4: The Effect of LDD Structure on the Characteristics of TFT Devices
Xu, Lin, Liu, Rusheng, Yuan, Bo, Du, Zhe, Liu, Yucheng, Li, JunfengVolume:
50
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.13385
Date:
September, 2019
File:
PDF, 760 KB
2019