Experimental investigation of the parameter dependency of...

Journal of Solid State Electrochemistry 2001 / 02 Vol. 5; Iss. 2

Experimental investigation of the parameter dependency of the removal rate of thermochemically polished CVD diamond films

J. A. Weima, W. R. Fahrner, R. Job
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Volume:
5
Language:
english
Pages:
7
DOI:
10.1007/s100080000118
Date:
February, 2001
File:
PDF, 146 KB
english, 2001
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