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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Highly Sensitive AlN Contour-Mode Resonator-Based Pressure Sensor for In-Line Monitoring of Chemical Reactions
Zuo, Jingjing, Zhang, Hainan, Chang, Ye, Liang, Ji, Pang, Wei, Duan, XuexinYear:
2019
Language:
english
DOI:
10.1109/TRANSDUCERS.2019.8808326
File:
PDF, 980 KB
english, 2019