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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic Substrate
Ji, Bowen, Wang, Minghao, Guo, Zhejun, Hong, Wen, Wang, Longchun, Wang, Xiaolin, Yang, Bin, Wang, Wei, Liu, JingquanYear:
2019
Language:
english
DOI:
10.1109/memsys.2019.8870820
File:
PDF, 2.44 MB
english, 2019