Process Development of Radical Based Dry Clean for Advanced...

Process Development of Radical Based Dry Clean for Advanced 3D NAND Fabrication

Wang, Shanyu, Zeng, Wilson, Yan, Chun, Chung, Hua, Lembesis, Pete, Lo, Jack, Ma, Shawming, Pakulski, Ryan, Yang, Michael
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Volume:
92
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/09202.0027ecst
Date:
July, 2019
File:
PDF, 673 KB
english, 2019
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