Study of Nitrogen Doping Effect on Lattice Strain Variation...

Materials Science Forum 2019 / 7 Vol. 963

Study of Nitrogen Doping Effect on Lattice Strain Variation in 4H-SiC Substrates by Synchrotron X-Ray Contour Mapping Method

Ailihumaer, Tuerxun, Yang, Yu, Guo, Jian Qiu, Raghothamachar, Balaji, Dudley, Michael
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Volume:
963
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.963.336
Date:
July, 2019
File:
PDF, 2.80 MB
english, 2019
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