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Formation and preferred growth behavior of grooved seed silicon substrate for kerfless technology
Yan, Jing-Yuan, Wang, Yong-Wei, Guo, Yong-Ming, Zhang, Wei, Wang, Cong, An, Bao-Li, Liu, Dong-FangVolume:
28
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/28/6/066802
Date:
June, 2019
File:
PDF, 6.11 MB
english, 2019