Low temperature growth of diamond-like nanocomposite films...

Materials Research Express 2019 / 10 Vol. 6; Iss. 11

Low temperature growth of diamond-like nanocomposite films prepared by PACVD from Ar diluted siloxane plasma

Das, Sayan, Jana, Sukhendu, De, Debasish, Gangopadhyay, Utpal, Mondal, Anup
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Volume:
6
Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/ab4d80
Date:
October, 2019
File:
PDF, 1.76 MB
english, 2019
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