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Novel Metal Electrodeposition and the Recent Application || Multi-Physics Simulation Platform and Multi-Layer Metal Technology for CMOS-MEMS Accelerometer with Gold Proof Mass
Sone, Masato, Masu, KazuyaVolume:
10.5772/in
Year:
2019
Language:
english
DOI:
10.5772/intechopen.81832
File:
PDF, 6.49 MB
english, 2019