A method for quantitative nanoscale imaging of dopant...

MRS Communications 2019 / 09 Vol. 9; Iss. 3

A method for quantitative nanoscale imaging of dopant distributions using secondary ion mass spectrometry: an application example in silicon photovoltaics

Eswara, Santhana, Pshenova, Alisa, Lentzen, Esther, Nogay, Gizem, Lehmann, Mario, Ingenito, Andrea, Jeangros, Quentin, Haug, Franz-Josef, Valle, Nathalie, Philipp, Patrick, Hessler-Wyser, Aïcha, Wirtz
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Volume:
9
Language:
english
Journal:
MRS Communications
DOI:
10.1557/mrc.2019.89
Date:
September, 2019
File:
PDF, 2.07 MB
english, 2019
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