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Analysis of Near-Field Intensity Distributions of High-Compression Talbot Array Illuminators Using Rigorous Diffraction Theory
Werner Klaus, Keiko Oka, Makoto Fujino, Kashiko KodateVolume:
8
Language:
english
Pages:
5
DOI:
10.1007/s10043-001-0271-6
Date:
July, 2001
File:
PDF, 722 KB
english, 2001