Design, analysis, and fabrication of silicon-based MEMS gyroscope for high-g shock platform
Wang, Jinkui, Lou, Wenzhong, Wang, Dakui, Feng, HengzhenLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-019-04596-9
Date:
August, 2019
File:
PDF, 2.70 MB
english, 2019