Design, analysis, and fabrication of silicon-based MEMS...

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Design, analysis, and fabrication of silicon-based MEMS gyroscope for high-g shock platform

Wang, Jinkui, Lou, Wenzhong, Wang, Dakui, Feng, Hengzhen
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-019-04596-9
Date:
August, 2019
File:
PDF, 2.70 MB
english, 2019
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