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Dependence of tracking error characteristics on objective lens shift for in-line-type differential push-pull methods using segmented gratings
Masahisa Shinoda, Kenya Nakai, Nobuo TakeshitaVolume:
17
Language:
english
Pages:
7
DOI:
10.1007/s10043-010-0066-8
Date:
July, 2010
File:
PDF, 243 KB
english, 2010