Phase-shifting mask design for interference exposure of...

Optical Review 2011 / 01 Vol. 18; Iss. 1

Phase-shifting mask design for interference exposure of chirp blazed grating

Shogo Ura, Kenji Kintaka, Hideyuki Awazu, Yasuhiro Awatsuji, Junji Nishii
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Volume:
18
Language:
english
Pages:
4
DOI:
10.1007/s10043-011-0040-0
Date:
January, 2011
File:
PDF, 601 KB
english, 2011
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