High-speed scanning fiber-optic heterodyne interferometer using a micro-electro-mechanical system mirror and an f-theta lens
Long Gao, Chunhui Wang, Yiqin Ji, Yanchao Li, Yang QuVolume:
18
Language:
english
Pages:
3
DOI:
10.1007/s10043-011-0085-0
Date:
November, 2011
File:
PDF, 454 KB
english, 2011